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vibrating beam accelerometer

A vibrating beam MEMS accelerometer for gravity and ...

2020-6-26  Vibrating wire accelerometers were further developed for ship-borne 10 and lunar gravimetry 11. More recently, vibrating beam resonant accelerometers have been miniaturised using silicon MEMS...

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Vibrating Beam Accelerometers SpringerLink

Their underlying physical principle is that the transverse resonant frequency of a string or bar depends on the tensile stress, and the stress can be made a function of acceleration by fixing a proof mass to the string or bar. We will examine the design of two versions of vibrating beam accelerometers (VBAs) and describe their performance models.

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Vibrating beam accelerometer Semantic Scholar

A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means for keeping the beam in vibration at the resonant frequency ...

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Vibrating Beam Accelerometer University of

UM File # 1963 Background Technology Description Applications Advantagesr measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed.Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means ...

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Vibrating beam accelerometer - Sundstrand Data

For a single beam force sensing element, one suitable vibration mode is a flexural mode in which the beam vibrates from side-to-side in a direction normal to the accelerometer's sensitive axis and normal to the lengthwise pendulum axis, i.e., the pendulum axis extending between the end connected to the flexure hinge and the end connected to the force sensing element.

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Vibrating beam accelerometer - NASA/ADS

1981-5-1  adshelp[at]cfa.harvard.edu The ADS is operated by the Smithsonian Astrophysical Observatory under NASA Cooperative Agreement NNX16AC86A

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Quartz Vibrating Beam Accelerometer - IXBlue Inc

2019-3-27  Quartz Vibrating Beam Accelerometer iXaL Series are accelerometers based on the Vibrating Beam Accelerometer (VBA) technology. The measurement uses the change in the resonance frequency of a vibrating beam under the inertial loading of a proof mass when subjected to acceleration. contact.ixal@ixblue ixblue

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(PDF) A vibrating beam MEMS accelerometer for

vibrating beam MEMS accelerometers can be employed for measurements requiring high levels of stability and resolution with wider implications for precision measurement employing other resonant-...

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Monolithic quartz structure vibrating beam

1996-6-7  Abstract: This paper describes the test results obtained on prototype Vibrating Beam Accelerometers (VBA) being developed by Pressure Systems, Hampton, VA intended for applications requiring 0.1 to 1.0 mg bias stability and 10 to 100 ppm scale factor stability. The principle of operation is based on vibrating quartz beam technology whereby the frequency of vibration is modulated by an

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US7024934B2 - Vibrating beam accelerometer -

FIG. 1illustrates one example of a known vibrating beam accelerometer; FIG. 2illustrates the method of the invention embodied in a process flow diagram; FIG. 3illustrates the method of the...

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Vibrating Beam Accelerometers SpringerLink

Norling, B.L., “Emergence of miniature quartz vibrating beam accelerometer technology for tactical navigation and flight control,” Joint Services Data Exchange, Cambridge, MA, Oct. 1988. Google Scholar

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Vibrating beam accelerometer Semantic Scholar

A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means for keeping the beam in vibration at the resonant frequency ...

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Quartz Vibrating Beam Accelerometer - IXBlue Inc

2020-10-7  1. The accelerometer output consists of two opposite vibrating beam frequencies, named cell one and cell two. Each signal represents acceleration G 2. Output signal F1 increase with an acceleration following the input axis 3. Output signal F2 decrease with an acceleration following the input axis 4. CGA : accelerometer center of gravity

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Vibrating Beam Accelerometer University of

UM File # 1963 Background Technology Description Applications Advantagesr measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed.Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means ...

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Vibrating Beam Accelerometer performance -

Vibrating Beam Accelerometer performance Gimera, Richard F.; Weber, Raymond E. Abstract. The paper describes the operation principle and performance of a Vibrating Beam Accelerometer (VBA) fabricated for USAF. Results of the VBA performance tests showed that the device meets the requirements of low-noise level; can operate at system ...

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Vibrating Beam Accelerometer with Hard Suspension

This report provides a bulk-micromachined vibratory beam accelerometer. The device structure includes a frame, heavy mass, thick suspension beams and thin vibrating beams. The suspension beams are designed to be soft to the sensitive axis and hard to the off-axis. This brings about low off-axis sensitivity and high shock survivability. Combining with analog/digital mixed interface circuitry ...

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Vibrating Beam Accelerometer performance

2019-5-26  American Institute of Aeronautics and Astronautics 12700 Sunrise Valley Drive, Suite 200 Reston, VA 20191-5807 703.264.7500

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US Patent for Vibrating beam accelerometer Patent

Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acceleration γ along this y axis, a resonator cell that comprises a resonator that can vibrate and be subjected to a tensile or ...

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US Patent for Vibrating beam accelerometer Patent

Vibrating beam accelerometer . Apr 26, 1993 - Ford. A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or ...

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石英振梁加速度计的小波神经网络温度补偿研究_论文_百度文库

Key words:quartz vibrating beam accelerometer;wavelet neural network;temperature dr ift;attitude a1. gorithm 加速度计作为惯导系统 的核心 传感器 ,在重力测 量和定 姿定位 中起到非常 重要 的作用

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Vibrating beam accelerometer Semantic Scholar

A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means for keeping the beam in vibration at the resonant frequency ...

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Vibrating beam accelerometer - Patent US

US-2019234988-A1 chemical patent summary.

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Vibrating Beam Accelerometer University of

UM File # 1963 Background Technology Description Applications Advantagesr measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed.Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means ...

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Vibrating Beam Accelerometer performance

2019-5-26  American Institute of Aeronautics and Astronautics 12700 Sunrise Valley Drive, Suite 200 Reston, VA 20191-5807 703.264.7500

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Vibrating Beam Accelerometer with Hard Suspension

This report provides a bulk-micromachined vibratory beam accelerometer. The device structure includes a frame, heavy mass, thick suspension beams and thin vibrating beams. The suspension beams are designed to be soft to the sensitive axis and hard to the off-axis. This brings about low off-axis sensitivity and high shock survivability. Combining with analog/digital mixed interface circuitry ...

Read More
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Vibrating Beam Accelerometer performance -

Vibrating Beam Accelerometer performance Gimera, Richard F.; Weber, Raymond E. Abstract. The paper describes the operation principle and performance of a Vibrating Beam Accelerometer (VBA) fabricated for USAF. Results of the VBA performance tests showed that the device meets the requirements of low-noise level; can operate at system ...

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Vibrating Beam Accelerometer

1996-5-9  Vibrating Beam Accelerometer. The vibrating beam accelerometer is based on vibrational and wave theory. Looking at Figure 4.12, we see a proof mass attached to a string that has an applied acceleration.If the string is made to vibrate, the natural frequency of vibration, , varies with the component of applied acceleration that is parallel to the string.

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Thermoelastic Damping in Vibrating Beam

2008-8-15  In order to respond to the demand of accurate miniature inertial navigation systems, ONERA has been working on the design of a vibrating beam accelerometer called the Vibrating Inertial Accelerometer (VIA). The accuracy of the VIA is directly related to the thermoelastic quality factor of its sensitive element, which is a beam made of quartz.

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石英振梁加速度计的小波神经网络温度补偿研究_论文_百度文库

Key words:quartz vibrating beam accelerometer;wavelet neural network;temperature dr ift;attitude a1. gorithm 加速度计作为惯导系统 的核心 传感器 ,在重力测 量和定 姿定位 中起到非常 重要 的作用

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个人主页 - UCAS

( 10 ) Vibrating beam accelerometer two-wafer fabrication process, 2005, 第 1 作者, 专利号: US 6938334 ( 11 ) Dual axis micro machined mirror device, 2002, 第 2 作者, 专利号: US 6454421 ( 12 ) Accelerometer with folded beams, 2004, 第 3 作者, 专利

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